Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-27T09:50:36.219Z Has data issue: false hasContentIssue false
  • English
  • Français

Too Close for Comfort: Creating Two TEM Samples From Areas Separated By 270 Nanometers

Published online by Cambridge University Press:  05 August 2019

Nathan Wang  and
George Perreault
Nathan Wang*
Affiliation:
Maxim Integrated, Failure Analysis, San Jose, CA, USA.
George Perreault
Affiliation:
Maxim Integrated, Failure Analysis, San Jose, CA, USA.
*
*Corresponding author: [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 856 - 857
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Wang, N and Li, S, Electronic Devices Failure Analysis 10 (2008), pp.12-16.Google Scholar
[2]Fujii, T et al. , in “Focused Ion Beam Systems”, ed. Yao, Nan, (Cambridge, New York) pp. 382-383.Google Scholar
[3]Volkert, CA and Minor, AM, MRS Bulletin, 32 (2007), pp. 389-399.Google Scholar