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The Tomographic Atom Probe: A New Dimension In Material Analysis
Published online by Cambridge University Press: 02 July 2020
Extract
Today material science requires the use of increasingly powerful tools in material analysis. The last twenty years have witnessed the development of a number of analytical techniques. However, among these techniques, only a few allow observation and analysis of materials at the nanometer level ; one can mention scanning transmission electron microscopy coupled with electron energy loss spectrometry (STEM-EELS), SIMS and atom-probe techniques. In the STEM combined with electron energy loss spectrometry the spatial resolution can be better than one nanometer on a wide scanning area. However the in-depth spatial resolution is limited by the specimen thickness and therefore strongly depends on samples preparation. On the contrary, In SIMS techniques the in-depth spatial resolution can be as good as one nanometer but the lateral resolution is set by the ion beam diameter.
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- Imaging and Analysis at the Atomic Level: 30 Years of Atom Probe Field Ion Microscopy
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- Copyright © Microscopy Society of America
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