This paper will cover the history of the first steps of electron probe microanalysis. I was not personally involved with the electron microprobe at the very beginning, although I have been fully involved in the field from 1955. Nevertheless I have interesting information about the heroic times - when, just after the World War, Raimond Castaing was preparing for his doctoral degree.

In January 1947, R. Castaing, graduate in physics, joined the Institute for Aeronautical Research (ONERA), recently created by the French government. In the Materials Science Department, he was very lucky to be endowed with two electron microscopes, very exceptional equipment - a real luxury in 1948. The first one, an American RCA instrument was devoted to metallurgical studies. The second one, build by a French company, was cannibalized by Castaing to produce a fine electron beam to perform point chemical analysis. The idea was suggested to him by Andre Guinier, a famous x-ray crystallographer (Guinier-Preston zones, discovered in 1939) as the best way to solve identification problems in metallography. Castaing was not so enthusiastic about this proposal; the story seemed to him too simple, so simple, he thought, that it was quite surprising that nobody had done it before; but he soon had to face many physical problems that made him understand why many people probably failed, especially lens aberrations that had to be corrected to produce the intense, fine beam of electrons. Another question soon arose about x-ray detection. It was easy to detect the continuous background, but not very informative. Finally Guinier lent Castaing one of his precious quartz crystals (specially cut and ground, of the Johanson type); it was adjusted on a small spectrograph that fitted the outside of the main column (safety rules were in their infancy!). In the first days of 1949, he was able to measure characteristic x-ray emission from a l-μm, 4 nA electron probe. Considering the poor conditions in France after the terrible war, the rapidity with which this result was obtained is quite remarkable.