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Three-Dimensional Measurements of Micro- to Nanometer-Scale Features at and Below the Surface Using Scanning Electron Microscopy

Published online by Cambridge University Press:  08 April 2017

M Zhao ,
B Ming ,
P Kavuri  and
A Vladár
M Zhao
Affiliation:
National Institute of Standards and Technology
B Ming
Affiliation:
National Institute of Standards and Technology
P Kavuri
Affiliation:
National Institute of Standards and Technology
A Vladár
Affiliation:
National Institute of Standards and Technology

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 992 - 993
Copyright
Copyright © Microscopy Society of America 2011