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Thin Film Thickness and Grain Structure Determination of Ferroelectric SrBi2Ta2O9 with Cross-Sectional Atomic Force Microscopy

Published online by Cambridge University Press:  01 August 2002

D.L. Pechkis ,
C. Caragianis-Broadbridge ,
A.H. Lehman ,
K. L. Klein ,
J.-P. Han  and
T. P. Ma
D.L. Pechkis
Affiliation:
Department of Physics, Southern Connecticut State Univ., New Haven, CT 06515
C. Caragianis-Broadbridge
Affiliation:
Department of Physics, Southern Connecticut State Univ., New Haven, CT 06515
A.H. Lehman
Affiliation:
Facility for Electron Microscopy; Trinity College, Hartford, CT 06106
K. L. Klein
Affiliation:
Facility for Electron Microscopy; Trinity College, Hartford, CT 06106
J.-P. Han
Affiliation:
Department of Electrical Engineering, Yale Univ., New Haven, CT 06520
T. P. Ma
Affiliation:
Department of Electrical Engineering, Yale Univ., New Haven, CT 06520

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 774 - 775
Copyright
Copyright © Microscopy Society of America 2002