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Thin Film Porosity Determined by X-Rays at SEM

Published online by Cambridge University Press:  23 September 2015

E. Ortel ,
R. Kraehnert ,
F. Galbert  and
V.-D. Hodoroaba
E. Ortel
Affiliation:
BAM Federal Institute for Materials Research and Testing, Berlin, Germany
R. Kraehnert
Affiliation:
Technical University of Berlin, Berlin, Germany
F. Galbert
Affiliation:
Technical University of Berlin, Berlin, Germany
V.-D. Hodoroaba
Affiliation:
BAM Federal Institute for Materials Research and Testing, Berlin, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1707 - 1708
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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