Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-26T02:30:22.849Z Has data issue: false hasContentIssue false

Thermo-Oxidative Stability of SiOx-doped Diamondlike Carbon Studied via Environmental XPS and AFM

Published online by Cambridge University Press:  27 August 2014

Robert W. Carpick
Affiliation:
Mechanical Engineering and Applied Mechanics Dept., U. Pennsylvania, Philadelphia, PA, USA Materials Science and Engineering Dept., U. Pennsylvania, Philadelphia, PA, USA
Filippo Mangolini
Affiliation:
Materials Science and Engineering Dept., U. Pennsylvania, Philadelphia, PA, USA
James Hilbert
Affiliation:
Mechanical Engineering and Applied Mechanics Dept., U. Pennsylvania, Philadelphia, PA, USA
Jennifer Lukes
Affiliation:
Mechanical Engineering and Applied Mechanics Dept., U. Pennsylvania, Philadelphia, PA, USA

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Donnet, C., Erdemir, A. Tribology of Diamond-Like Carbon Films (Springer, New York, 2008).Google Scholar
[2] Robertson, J. Materials Science and Engineering: R: Reports 37, 129 (2002).Google Scholar
[3] Sullivan, J.P., Friedmann, T.,andBaca, A. Journal of Electronic Materials 26, 1021 (1997).Google Scholar
[4] Scharf, T.W., Ohlhausen, J.A., Tallant, D.R., and Prasad, S.V. J. Appl. Phys. 101, 63521 (2007).Google Scholar
[5] Dorfman, V.F. Thin Solid Films 212, 267 (1992).Google Scholar
[6] Kryder, M.H., Gage, E.C., McDaniel, T.W., Challener, W.A., Rottmayer, R.E., Ganping, J., Yiao-Tee, H. ,and Erden, M.F. Proc. IEEE 96, 1810 (2008).Google Scholar
[7] Mangolini, F., Ahlund, J., Wabiszewski, G.E., Adiga, V.P., Egberts, P., Streller, F., Backlund, K., Karlsson, P.G., Wannberg, B., and Carpick, R.W. Rev. Sci. Instrum. 83, 093112 (2012).Google Scholar