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TEM-EELS Study on the Ash Damage and Repair of Porous Low-k Films

Published online by Cambridge University Press:  05 August 2007

J Wang ,
D Cha ,
PM Matz ,
CE Smith ,
DW Mueller ,
RF Reidy  and
MJ Kim
J Wang
Affiliation:
University of Texas at Dallas
D Cha
Affiliation:
University of Texas at Dallas
PM Matz
Affiliation:
Texas Instruments
CE Smith
Affiliation:
University of North Texas
DW Mueller
Affiliation:
University of North Texas
RF Reidy
Affiliation:
University of North Texas
MJ Kim
Affiliation:
University of Texas at Dallas
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 794 - 795
Copyright
© 2007 Microscopy Society of America

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