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Tem Study of The Microstructure of Si Thin Films Deposited by Hot Wire CVD

Published online by Cambridge University Press:  01 August 2002

K.M. Jones ,
M.M. Al-Jassim ,
D.H. Levi  and
B.P. Nelson
K.M. Jones
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
M.M. Al-Jassim
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
D.H. Levi
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
B.P. Nelson
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1196 - 1197
Copyright
Copyright © Microscopy Society of America 2002