TEM Specimen Preparation with Plasma FIB Xe+ Ions

L Giannuzzi; N Smith

doi:10.1017/S1431927611004107

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Bassim, Nabil Scott, Keana and Giannuzzi, Lucille A. 2014. Recent advances in focused ion beam technology and applications. MRS Bulletin, Vol. 39, Issue. 4, p. 317.

Delobbe, A. Salord, O. Hrncir, T. David, A. Sudraud, P. and Lopour, F. 2014. High Speed TEM Sample Preparation by Xe FIB. Microscopy and Microanalysis, Vol. 20, Issue. S3, p. 298.

Giannuzzi, Lucille A. Yu, Zhiyang Yin, Denise Harmer, Martin P. Xu, Qiang Smith, Noel S. Chan, Lisa Hiller, Jon Hess, Dustin and Clark, Trevor 2015. Theory and New Applications ofEx SituLift Out. Microscopy and Microanalysis, Vol. 21, Issue. 4, p. 1034.

Berthier, Remy Nail, Cécile Carabasse, Catherine Molas, Gabriel and Cooper, David 2017. In Situ Biasing of Conductive Bridge Resistive Memory Devices Observed in a Transmission Electron Microscope. Microscopy and Microanalysis, Vol. 23, Issue. S1, p. 1452.

Musiienko, Denys Straka, Ladislav Klimša, Ladislav Saren, Andrey Sozinov, Alexei Heczko, Oleg and Ullakko, Kari 2018. Giant magnetic-field-induced strain in Ni-Mn-Ga micropillars. Scripta Materialia, Vol. 150, Issue. , p. 173.

Smith, A.D. Donoghue, J. Garner, A. Winiarski, B. Bousser, E. Carr, J. Behnsen, J. Burnett, T.L. Wheeler, R. Wilford, K. Withers, P.J. and Preuss, M. 2019. On the Application of Xe+ Plasma FIB for Micro-fabrication of Small-scale Tensile Specimens. Experimental Mechanics, Vol. 59, Issue. 8, p. 1113.

Van Leer, Brandon and Dutka, Mikhail 2019. Latest Developments in Multiple Ion Species Plasma FIB Technology. Microscopy and Microanalysis, Vol. 25, Issue. S2, p. 570.

MacLaren, Ian Nord, Magnus Jiao, Chengge and Yücelen, Emrah 2019. Liftout of High-Quality Thin Sections of a Perovskite Oxide Thin Film Using a Xenon Plasma Focused Ion Beam Microscope. Microscopy and Microanalysis, Vol. 25, Issue. 1, p. 115.

Smith, Albert D. Donoghue, Jack M. Garner, Alistair J. W. Lunt, David Harte, Allan Wilford, Keith Withers, Philip J. and Preuss, Michael 2020. Novel Methods for Recording Stress-Strain Curves in Proton Irradiated Material. Scientific Reports, Vol. 10, Issue. 1,

Shichi, Hiroyasu and Tomimatsu, Satoshi 2020. Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 38, Issue. 5,

Liu, Jinqiao Niu, Ranming Gu, Ji Cabral, Matthew Song, Min and Liao, Xiaozhou 2020. Effect of Ion Irradiation Introduced by Focused Ion-Beam Milling on the Mechanical Behaviour of Sub-Micron-Sized Samples. Scientific Reports, Vol. 10, Issue. 1,

Vitale, Suzy and Sugar, Joshua 2021. Expanding the Capability of Xe Plasma Focused Ion Beam Sample Preparation for Transmission Electron Microscopy. Microscopy and Microanalysis, Vol. 27, Issue. S1, p. 218.

Zhong, Xiangli Wade, C. Austin Withers, Philip J. Zhou, Xiaorong Cai, Changrun Haigh, Sarah J. and Burke, M. Grace 2021. Comparing Xe+pFIB and Ga+FIB for TEM sample preparation of Al alloys: Minimising FIB‐induced artefacts. Journal of Microscopy, Vol. 282, Issue. 2, p. 101.

Kotula, Paul G Vitale, Suzy M Perry, Daniel L Cummings, Damion P Deitz, Julia and Michael, Joseph R 2022. Focused Ion Beam Preparation of Low Melting Point Metals: Lessons Learned from Pb/Sn Solders. Microscopy and Microanalysis, Vol. 28, Issue. S1, p. 10.

Vitale, Suzy M. and Sugar, Joshua D. 2022. Using Xe Plasma FIB for High-Quality TEM Sample Preparation. Microscopy and Microanalysis, Vol. 28, Issue. 3, p. 646.

Glushkov, Evgenii Macha, Michal Räth, Esther Navikas, Vytautas Ronceray, Nathan Cheon, Cheol Yeon Ahmed, Aqeel Avsar, Ahmet Watanabe, Kenji Taniguchi, Takashi Shorubalko, Ivan Kis, Andras Fantner, Georg and Radenovic, Aleksandra 2022. Engineering Optically Active Defects in Hexagonal Boron Nitride Using Focused Ion Beam and Water. ACS Nano, Vol. 16, Issue. 3, p. 3695.

Vinograd, I. Shirer, K. R. Massat, P. Wang, Z. Kissikov, T. Garcia, D. Bachmann, M. D. Horvatić, M. Fisher, I. R. and Curro, N. J. 2022. Second order Zeeman interaction and ferroquadrupolar order in TmVO4. npj Quantum Materials, Vol. 7, Issue. 1,

Iida, Shin-ichi 2023. From Ga-FIB to Bi-FIB: In situ TOF-SIMS Imaging of Buried Interfaces. Journal of Surface Analysis, Vol. 30, Issue. 2, p. 120.

Lucas, Bronwyn A. and Grigorieff, Nikolaus 2023. Quantification of gallium cryo-FIB milling damage in biological lamellae. Proceedings of the National Academy of Sciences, Vol. 120, Issue. 23,

Singh, Kritika Rout, Surya Snata Krywka, Christina and Davydok, Anton 2023. Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing. Materials, Vol. 16, Issue. 22, p. 7220.

Download full list

Article contents

TEM Specimen Preparation with Plasma FIB Xe+ Ions

Extract

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests