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T- SEM: Quantitative Composition and Structure Analysis of FIB lamellae in SEM
Published online by Cambridge University Press: 22 July 2022
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- Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
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- Copyright
- Copyright © Microscopy Society of America 2022
References
Brodu, E, Bouzy, E and Fundenberger, J, Microsc. Microanal. 23 (Suppl. 1) (2017) 530-531CrossRefGoogle Scholar
Terborg, R and Rohde, M, EMC Conf. Proceedings (2008), doi.org/10.1007/978-3-540-85156-1_317Google Scholar
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