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Surface Damage In Silicon After 30 Kev Ga Fib Fabrication

Published online by Cambridge University Press:  24 July 2003

S. Rubanov
Affiliation:
School of Physics, University of Melbourne, Victoria 3010, Australia
P.R. Munroe
Affiliation:
Electron Microscope Unit, University of NSW, Sydney 2052, Australia
S. Prawer
Affiliation:
School of Physics, University of Melbourne, Victoria 3010, Australia
D.N. Jamieson
Affiliation:
School of Physics, University of Melbourne, Victoria 3010, Australia

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2003