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Surface Damage In Silicon After 30 Kev Ga Fib Fabrication

Published online by Cambridge University Press:  24 July 2003

S. Rubanov ,
P.R. Munroe ,
S. Prawer  and
D.N. Jamieson
S. Rubanov
Affiliation:
School of Physics, University of Melbourne, Victoria 3010, Australia
P.R. Munroe
Affiliation:
Electron Microscope Unit, University of NSW, Sydney 2052, Australia
S. Prawer
Affiliation:
School of Physics, University of Melbourne, Victoria 3010, Australia
D.N. Jamieson
Affiliation:
School of Physics, University of Melbourne, Victoria 3010, Australia

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 884 - 885
Copyright
Copyright © Microscopy Society of America 2003