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Sub-nm Resolution, Sub-pm Precision Structure Mapping Robust to Thickness and Tilt Variations by Cepstral Analysis of Scanning Nanodiffraction 4D-STEM

Published online by Cambridge University Press:  05 August 2019

Paul Cueva ,
Elliot Padget  and
David A. Muller
Paul Cueva*
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USA
Elliot Padget
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USA
David A. Muller
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USA Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY, USA
*
*Corresponding Author: [email protected]

Abstract

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Type
Electron Crystallography of Nano-structures in Nanotechnology, Materials and Bio-Sciences
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1934 - 1935
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Tate, M, et al. , Microscopy and Microanalysis 22 (2016), pp. 237-249.Google Scholar
[2]Han, Y., et al. , Nano Letters, 18 (2018), pp. 3746–3751.Google Scholar
[3]Lee, JK, et al. , Pattern Recognition, 26 10 (1993), pp. 1579-1592.Google Scholar
[4]Cueva, P, Padget, E and Muller, DA, Microscopy and Microanalysis 24S1 (2018), pp. 490-491.Google Scholar
[5]Ozdol, VB, et al. , Applied Physics Letters 106 (2015), 253107.Google Scholar
[6]PC was supported by the Center for Bright Beams, an NSF STC (PHY-1549132). EP supported by DOE EERE (DE-EE0007271). This work made use of the Cornell Center for Materials Research Shared Facilities, an NSF MRSEC (DMR-1719875 and NSF-MRI-1429155).Google Scholar