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A Study of the Effectiveness of the Removal of Hydrocarbon Contamination by Oxidative Cleaning Inside the Sem

Published online by Cambridge University Press:  01 August 2002

Neal Sullivan ,
Tung Mai ,
Scott Bowdoin  and
Ronald Vane
Neal Sullivan
Affiliation:
Schlumberger Technologies, 45 Winthrop St., Concord, MA 01742
Tung Mai
Affiliation:
Schlumberger Technologies, 45 Winthrop St., Concord, MA 01742
Scott Bowdoin
Affiliation:
Schlumberger Technologies, 45 Winthrop St., Concord, MA 01742
Ronald Vane
Affiliation:
XEI Scientific, 3124 Wessex Way, Redwood City, CA 94061

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 720 - 721
Copyright
Copyright © Microscopy Society of America 2002