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Study of Groove Formation in InP Surface During Zn Diffusion

Published online by Cambridge University Press:  05 August 2019

I. Grimberg ,
A. Giladi ,
M. Nitzani ,
I. Lukomsky  and
Y. Furst
I. Grimberg*
Affiliation:
SemiConductor Devices, Haifa, Israel
A. Giladi
Affiliation:
SemiConductor Devices, Haifa, Israel
M. Nitzani
Affiliation:
SemiConductor Devices, Haifa, Israel
I. Lukomsky
Affiliation:
SemiConductor Devices, Haifa, Israel
Y. Furst
Affiliation:
SemiConductor Devices, Haifa, Israel
*
*Corresponding author: [email protected]

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 814 - 815
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Riesz, F et al. , Materials Science and Engineering B 80 (2001), p. 54.Google Scholar
[2]Edger, D et al. , Journal of Electronic Materials 16 (1987), p. 163.Google Scholar
[3]le Goff, F et al. , Semiconductor Science and Technology 31 (2016), p. 1.Google Scholar
[4]Sun, Y et al. , Journal of Applied Physics 97 (2005), p. 124902.Google Scholar
[5]The authors acknowledge Y. Kauffmann and Galit Atiya from the Technion, Israel, Department of Materials Science and Engineering for their contribution in the TEM anlysis on Titan Themis G2.Google Scholar