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Structural Characterization and Modeling of the Aluminum (111) / Aluminum Oxide (0001) Interface

Published online by Cambridge University Press:  02 July 2020

D.L. Medlin ,
J.E. Smugeresky ,
K.F. McCarty ,
P.D. Tepesch ,
A.A. Quong  and
M.I. Baskes
D.L. Medlin
Affiliation:
Sandia National Laboratories, Livermore, California, 94551
J.E. Smugeresky
Affiliation:
Sandia National Laboratories, Livermore, California, 94551
K.F. McCarty
Affiliation:
Sandia National Laboratories, Livermore, California, 94551
P.D. Tepesch
Affiliation:
Sandia National Laboratories, Livermore, California, 94551
A.A. Quong
Affiliation:
Sandia National Laboratories, Livermore, California, 94551
M.I. Baskes
Affiliation:
Sandia National Laboratories, Livermore, California, 94551
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Extract

We are investigating the structure of the Al (11l)/Al2O3 (0001) interface. Interfaces for this study were produced by epitaxial thin film deposition of aluminum metal onto (0001) oriented single crystal α-Al2O3. The majority of grains within the films are oriented with:

(0001)Al2O3 || (lll)Al [10Î0]Al2O3 || [ī10]Al

This relationship results in a matching of the close-packed planes and directions of the aluminum metal with those of the oxygen ion sub-lattice in the Al2O3and allows for two variants related by 180° rotations about the aluminum [111] axis. A diffraction pattern showing these two variants is given in Figure 1. Figure 2 shows a HRTEM image of the heteroepitaxial aluminum/Al2O3 interface. The Al2O3 substrate and aluminum overlayer are imaged along the [10Ï0]Al2O3 and [ī10]A1 zones. Over the width of the image, the interface is sharp to within a few atomic layers.

The calculated lattice misfit for the Al/Al2O3 system, taken as the difference between the translation vectors of a/3[10ī0]Al2O3 (2.7447 Å) and a/2[ī10]AI (2.8634 Å), is 4.3%. A fundamental issue is the manner in which this misfit is accommodated.

Type
Atomic Structure and Mechanisms at Interfaces in Materials
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 637 - 638
Copyright
Copyright © Microscopy Society of America 1997

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References

1. Medlin, D.L., McCarty, K.F., Hwang, R.Q., Guthrie, S., and Baskes, M.I., to be published in Thin Solid Films (1997).Google Scholar

2. Dehm, G., Ruhle, M., Ding, G., and Raj, R. , Philosophical Magazine B, 71 (6) (1995) 1111–1124.CrossRefGoogle Scholar

3. This work is supported by the U.S. Department of Energy under contract DE-AC04-94AL85000 and in part by OBES-DMS.Google Scholar