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Strain Measurement of Selective Epitaxial Growth (SEG) SiGe Structure by the Nano Beam Diffraction (NBD) Method

Published online by Cambridge University Press:  08 April 2017

S-W Kim ,
J-H Yoo ,
S-M Koo  and
D-H Ko
S-W Kim
Affiliation:
Yonsei University, Korea
J-H Yoo
Affiliation:
Yonsei University, Korea
S-M Koo
Affiliation:
Yonsei University, Korea
D-H Ko
Affiliation:
Yonsei University, Korea

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1108 - 1109
Copyright
Copyright © Microscopy Society of America 2011