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Stoichiometric analysis of superficial Ba doped Strontium Titanium Oxide layers using APT: the case of the missing Oxygen!

Published online by Cambridge University Press:  30 July 2021

Richard J. H. Morris ,
Mihaela Popovici ,
Johan Meersschaut ,
Jeroen Scheerder ,
Ludovic Goux ,
Gouri Kar ,
Claudia Fleischmann ,
Wilfried Vandervorst  and
Paul van der Heide
Richard J. H. Morris
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Mihaela Popovici
Affiliation:
IMEC, United States
Johan Meersschaut
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, United States
Jeroen Scheerder
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Ludovic Goux
Affiliation:
IMEC, United States
Gouri Kar
Affiliation:
IMEC, United States
Claudia Fleischmann
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, Belgium
Wilfried Vandervorst
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, United States
Paul van der Heide
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, United States

Abstract

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Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2480 - 2481
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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