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“Stand-Out”: A Novel Approach for Preparing Sub-100 nm Samples Through in situ Ion Induced Bending

Published online by Cambridge University Press:  05 August 2019

Vivek Garg ,
Shuo Zhang ,
Rakesh G. Mote ,
Yu Chen ,
Lingfei Cao  and
Jing Fu
Vivek Garg
Affiliation:
IITB-Monash Research Academy, Indian Institute of Technology Bombay, Mumbai, India. Department of Mechanical Engineering, Indian Institute of Technology Bombay, Mumbai, India. Department of Mechanical and Aerospace Engineering, Monash University, Clayton, Australia.
Shuo Zhang
Affiliation:
Department of Mechanical and Aerospace Engineering, Monash University, Clayton, Australia.
Rakesh G. Mote
Affiliation:
Department of Mechanical Engineering, Indian Institute of Technology Bombay, Mumbai, India.
Yu Chen
Affiliation:
Monash Centre for Electron Microscopy, Monash University, Clayton, Australia.
Lingfei Cao
Affiliation:
International Joint Laboratory for Light Alloys (Ministry of Education), College of Materials Science and Engineering, Chongqing University, Chongqing, China.
Jing Fu
Affiliation:
Department of Mechanical and Aerospace Engineering, Monash University, Clayton, Australia.

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 898 - 899
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Giannuzzi, LA and Stevie, FA, Micron 30 (1999), p. 197.Google Scholar
[2]Saxey, DW et al. , Ultramicroscopy 107 (2007), p. 756.Google Scholar
[3]Garg, V et al. , Weaving Nanostructures with Site-Specific Ion Induced Bidirectional Bending (under review).Google Scholar
[4]Herbig, M et al. , Ultramicroscopy 153 (2015), p. 32.Google Scholar
[5]The work is financially supported by IITB-Monash Research Academy, the Australian Research Council (DP180103955), IRCC (Seed grant: Spons/ME/I14079-1/2014), IIT Bombay, and Tata Consultancy Services (TCS) research scholarship program. The authors acknowledge the use of facilities within the Monash Centre for Electron Microscopy (MCEM), and Melbourne Centre for Nanofabrication (MCN), Victorian Node of the Australian National Fabrication Facility (ANFF).Google Scholar