Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-12T21:37:52.824Z Has data issue: false hasContentIssue false
  • English
  • Français

A Standards-based Approach to Dopant Quantification Using Atom Probe Tomography

Published online by Cambridge University Press:  22 July 2022

Karen DeRocher ,
Mark McLean  and
Fred Meisenkothen
Karen DeRocher*
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
Mark McLean
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
Fred Meisenkothen
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
*
*Corresponding author: [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Expanding the Limits of Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 728 - 729
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Fuechsle, M et al. , Nature Nanotechnology 7 (2012), p. 242. doi: 10.1038/nnano.2012.21CrossRefGoogle Scholar
Barnes, JP et al. , Scripta Materialia 148 (2018), p. 91. doi: 10.1016/j.scriptamat.2017.05.012CrossRefGoogle Scholar
Giddings, AD et al. , Scripta Materialia 148 (2018), p. 82–90. doi: 10.1016/j.scriptamat.2017.09.004CrossRefGoogle Scholar
Khan, MA, Ringer, SP and Zheng, R, Advanced Materials Interfaces 3 (2016). doi: 10.1002/admi.201500713Google Scholar
Larson, DJ et al. in “Local Electrode Atom Probe Tomography: A User's Guide”, (Springer, New York) p. 29. doi: 10.1007/978-1-4614-8721-0CrossRefGoogle Scholar
Seidman, DN and Stiller, K, MRS Bulletin 34 (2009), p. 717. doi: 10.1557/mrs2009.194CrossRefGoogle Scholar
Morris, RJH et al. , Journal of Vacuum Science & Technology B 36 (2018), p. 03F130. doi: 10.1116/1.5019693CrossRefGoogle Scholar
Meisenkothen, F et al. , Ultramicroscopy 159(1) (2015), p. 101. doi: 10.1016/j.ultramic.2015.07.009CrossRefGoogle Scholar
Simmons, DS et al. , Journal of Vacuum Science and Technology B 25 (2007), p. 1365. doi: 10.1116/1.2759937CrossRefGoogle Scholar
Thompson, K et al. , Ultramicroscopy 107 (2007), p. 131. doi: 10.1016/j.ultramic.2006.06.008CrossRefGoogle Scholar
Certain commercial equipment, instruments, or materials are identified in this paper in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.Google Scholar