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Spherical Aberration Corrected TEM/STEM Analysis of La2O3 Thin Film Deposited on Si (001) Substrate

Published online by Cambridge University Press:  26 July 2009

S Inamoto ,
J Yamasaki ,
E Okunishi ,
K Kakushima ,
H Iwai  and
N Tanaka
S Inamoto
Affiliation:
Nagoya University,Japan
J Yamasaki
Affiliation:
Nagoya University,Japan
E Okunishi
Affiliation:
JEOL Limited,Japan
K Kakushima
Affiliation:
Tokyo Institute of Technology,Japan
H Iwai
Affiliation:
Tokyo Institute of Technology,Japan
N Tanaka
Affiliation:
Nagoya University,Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1010 - 1011
Copyright
Copyright © Microscopy Society of America 2009