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Spectrum Image Mapping with a Silicon Drift Detector (SDD) in an SEM

Published online by Cambridge University Press:  01 August 2004

D E Newbury
Affiliation:
National Institute of Standards & Technology, Gaithersburg, Maryland
J A Small
Affiliation:
National Institute of Standards & Technology, Gaithersburg, Maryland
David Bright
Affiliation:
National Institute of Standards & Technology, Gaithersburg, Maryland
Jan S Iwanczyk
Affiliation:
Radiant Detectors LLC, Northridge, California
Shaul Barkan
Affiliation:
Radiant Detectors LLC, Northridge, California
J F Thiot
Affiliation:
SAMx, France
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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