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Soft X-ray Emission Spectroscopy on Chemical States of 3D-Transition Metal Elements with SEM

Published online by Cambridge University Press:  23 September 2015

M. Terauchi
Affiliation:
IMRAM, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
H. Takahashi
Affiliation:
Global business promotion division, JEOL Ltd., 2-1-1 Otemachi, Chiyoda-ku, Tokyo 100-0004, Japan
T. Murano
Affiliation:
SA Technical Development Division, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
T. Imazono
Affiliation:
Quantum Beam Science Center, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kizu 619-0215, Japa.
M. Koike
Affiliation:
Quantum Beam Science Center, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kizu 619-0215, Japa.
T. Nagano
Affiliation:
Device Department, Shimadzu Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
M. Koeda
Affiliation:
Device Department, Shimadzu Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Terauchi, M, et al., Microscopy and Microanalysis 20 (2014) 629.Google Scholar
[2] Imazono, T, et al., Applied Optics 51 (2012) 2351.Google Scholar