Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-29T15:14:10.191Z Has data issue: false hasContentIssue false
  • English
  • Français

Site Specific TEM Specimen Preparation for Characterization of Extended Defects in 4H-SiC Epilayers

Published online by Cambridge University Press:  27 August 2014

Mina Abadier ,
Rachael L. Myers-Ward ,
Haizheng Song ,
D. Kurt Gaskill ,
Chip R. Eddy Jr. ,
Tangali S. Sudarshan ,
Yoosuf N. Picard  and
Marek Skowronski
Mina Abadier
Affiliation:
Carnegie Mellon University, Department of Materials Science and Engineering, Pittsburgh, USA
Rachael L. Myers-Ward
Affiliation:
U.S. Naval Research Laboratory, Washington D.C., USA
Haizheng Song
Affiliation:
University of South Carolina, Department of Electrical Engineering, Columbia, USA
D. Kurt Gaskill
Affiliation:
U.S. Naval Research Laboratory, Washington D.C., USA
Chip R. Eddy Jr.
Affiliation:
U.S. Naval Research Laboratory, Washington D.C., USA
Tangali S. Sudarshan
Affiliation:
University of South Carolina, Department of Electrical Engineering, Columbia, USA
Yoosuf N. Picard
Affiliation:
Carnegie Mellon University, Department of Materials Science and Engineering, Pittsburgh, USA
Marek Skowronski
Affiliation:
Carnegie Mellon University, Department of Materials Science and Engineering, Pittsburgh, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 344 - 345
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Nakayama, K, et al, Materials Science Forum 740-742 ( (2013), 903.Google Scholar
[2] Ha, S, et al, Journal of Applied Physics 96 (2004), 393.Google Scholar
[3] Song, H, et al, Journal of Crystal Growth 371 (2013), 94.Google Scholar