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Site Specific TEM Analysis of Micrometer-Sized Particles with the FIB Lift-Out Technique

Published online by Cambridge University Press:  02 July 2020

J. K. Lomness ,
L. A. Giannuzzi  and
M. D. Hampto
J. K. Lomness
Affiliation:
Advanced Materials Processing and Analysis Center, Mechanical Materials & Aerospace Engineering, Orlando, FL, 32816.
L. A. Giannuzzi
Affiliation:
Advanced Materials Processing and Analysis Center, Mechanical Materials & Aerospace Engineering, Orlando, FL, 32816.
M. D. Hampto
Affiliation:
Department of Chemistry, University of Central Florida, 4000 Central Florida Blvd., Orlando, FL, 32816.
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Extract

The focused ion beam (FIB) instrument offers an efficient and reproducible approach for obtaining electron transparent membranes of uniform thickness for TEM analysis. Thus, the use of the FIB to investigate numerous types of materials has grown tremendously recently. Prenitzer et al. demonstrated the ability to acquire TEM specimens from individual Zn powder particles using the FIB lift-out (LO) specimen preparation technique. The 10 μm × 100 μm Zn powders particles were larger than the 5 μrn x 20 μm FIB LO specimen and therefore the LO technique could be directly applied to an individual powder particle. This paper will discuss a novel approach for the preparation of site specific micrometer-sized particles for TEM analysis using the FIB LO technique. The uniqueness of the technique described herein is that site specific TEM LO specimens may be obtained from regions which are smaller than the conventional dimensions of the LO specimen.

Type
Applications and Developments of Focused Ion Beams
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 518 - 519
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Giannuzzi, et al., Mat. Res. Soc. Symp. Proc. Vol. 480, (1997), 19.CrossRefGoogle Scholar
2.Giaimuzzi, et al., Microscopy Research and Technique, 41 (1998)285.3.0.CO;2-Q>CrossRefGoogle Scholar
3.Prenitzer, et al., Metall. and Mats. Trans. A., SEP 01 (1998) v29 n 9, p 2399.CrossRefGoogle Scholar
4. The support of the Florida Space Grant Consortium, AMP AC and the I4/UCF/Cirent Partnership is greatly appreciated. This work could not have been accomplished without the gracious support of FEI Company and Micro Optics Inc.Google Scholar