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A Site- and Layer-Specific Sample Preparation Technique for Plan View TEM of Laser Diodes

Published online by Cambridge University Press:  01 August 2002

J. Tanimura ,
K. Kawasaki ,
Y. Yoshida  and
H. Kurokawa
J. Tanimura
Affiliation:
Mitsubishi Electric Corporation, Advanced Technology R&D Center, Tsukaguchi-Honmachi 8-1-1, Amagasaki, Hyogo, Japan, 661-8661
K. Kawasaki
Affiliation:
Mitsubishi Electric Corporation, High Frequency & Optical Semiconductor Division, Mizuhara 4-1, Itami, Hyogo, Japan, 664-8641
Y. Yoshida
Affiliation:
Mitsubishi Electric Corporation, High Frequency & Optical Semiconductor Division, Mizuhara 4-1, Itami, Hyogo, Japan, 664-8641
H. Kurokawa
Affiliation:
Mitsubishi Electric Corporation, Advanced Technology R&D Center, Tsukaguchi-Honmachi 8-1-1, Amagasaki, Hyogo, Japan, 661-8661

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 550 - 551
Copyright
Copyright © Microscopy Society of America 2002