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Simultaneous DualEELS and EDS Analysis Across the Ohmic Contact Region in FinFET Electronic Devices - Exploring the Effects of Electron Beam Damage

Published online by Cambridge University Press:  25 July 2016

P. Longo ,
H. Zhang  and
R.D. Twesten
P. Longo
Affiliation:
Gatan Inc. 5794 W Las Positas Blvd, Pleasanton, CA, USA
H. Zhang
Affiliation:
Precision TEM, 3350 Scoot Blvd., 36B, Santa Clara, CA, USA
R.D. Twesten
Affiliation:
Gatan Inc. 5794 W Las Positas Blvd, Pleasanton, CA, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 260 - 261
Copyright
© Microscopy Society of America 2016