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Simultaneous DualEELS and EDS Analysis Across the Ohmic Contact Region in FinFET Electronic Devices - Exploring the Effects of Electron Beam Damage
Published online by Cambridge University Press: 25 July 2016
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- Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 260 - 261
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- © Microscopy Society of America 2016
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