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Simulation of Energy Deposition in E-Beam Irradiated Polymers

Published online by Cambridge University Press:  02 July 2020

Paula Horny ,
Raynald Gauvin ,
Pierre Hovington  and
Simon Besner
Paula Horny
Affiliation:
Département de Génie Mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada
Raynald Gauvin
Affiliation:
Département de Génie Mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada
Pierre Hovington
Affiliation:
IREQ, Institut de recherche d’Hydro Québec, Varennes, Québec, Canada
Simon Besner
Affiliation:
LTEE, Laboratoire des technologies électrochimiques et électrotechnologiques d’Hydro Québec, Shawinigan, Québec, Canada
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Extract

Introduction

Radiation curing of polymers, by UV light or E-beam, is of growing interest in the state-of-the-art industry. Radiation curing is solvent free and leads to important energy and money savings. Improved materials characteristics, better control of doses and more accurate application allow radiation curing to take a big part of the surface coating industry and, for the last ten years, the polymeric and microelectronics (lithography) industry. But behaviors of polymers under radiant source is often empirically characterized. In this abstract, it is proposed a way to obtain accurate energy distribution from Monte Carlo simulations. For bulk or thin polymeric films, it is therefore essential to simulate energy distribution, in order to foresee what happens in the sample.

Results

CASINO is a single scattering Monte Carlo Simulation of electroN trajectory in sO lid -particularly designed for low energy beam interaction in a bulk and thin foil.

Type
Mas Celebrates: Fifty Years of Electron Probe Microanalysis
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 606 - 607
Copyright
Copyright © Microscopy Society of America

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References

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