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SEM Through Dielectric Membranes: Secondary Electron Contrast Reversal

Published online by Cambridge University Press:  27 August 2014

D.N. Leonard ,
D. S. Gardiner  and
R. L. Thomas
D.N. Leonard
Affiliation:
Materials Science & Technology, Oak Ridge National Laboratory, Oak Ridge, TNUSA
D. S. Gardiner
Affiliation:
Protochips, Inc. Raleigh, NC, USA
R. L. Thomas
Affiliation:
Protochips, Inc. Raleigh, NC, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 24 - 25
Copyright
Copyright © Microscopy Society of America 2014 

References

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[4] Joy, D.C & Joy, C.S Journal of Microscopy 221 (2006), pp. 84-88.Google Scholar