SEM Autofocusing and Astigmatism Correction using FFT and GPGPU techniques

N.H. Caldwell; A.J. Marshall; B.C. Breton; D.M. Holburn

doi:10.1017/S1431927613005862

SEM Autofocusing and Astigmatism Correction using FFT and GPGPU techniques

Published online by Cambridge University Press: 09 October 2013

B.C. Breton and

N.H. Caldwell: Affiliation:
A.J. Marshall: Affiliation:
B.C. Breton: Affiliation:
D.M. Holburn: Affiliation:

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Abstract

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type: Abstract
Information: Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 774 - 775

DOI: https://doi.org/10.1017/S1431927613005862 [Opens in a new window]

Article contents

SEM Autofocusing and Astigmatism Correction using FFT and GPGPU techniques

Abstract

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