Sculpting Needle-Shaped Atom Probe Specimens with a Dual Beam FIB

M K Miller

doi:10.1017/S1431927605502010

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

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Gorman, Brian P. Norman, Andrew G. and Yan, Yanfa 2007. Atom Probe Analysis of III–V and Si-Based Semiconductor Photovoltaic Structures. Microscopy and Microanalysis, Vol. 13, Issue. 6, p. 493.

Kelly, Thomas F. and Larson, David J. 2012. Atom Probe Tomography 2012. Annual Review of Materials Research, Vol. 42, Issue. 1, p. 1.

Bleuet, P. Audoit, G. Barnes, J.-P. Bertheau, J. Dabin, Y. Dansas, H. Fabbri, J.-M. Florin, B. Gergaud, P. Grenier, A. Haberfehlner, G. Lay, E. Laurencin, J. Serra, R. and Villanova, J. 2013. Specifications for Hard Condensed Matter Specimens for Three-Dimensional High-Resolution Tomographies. Microscopy and Microanalysis, Vol. 19, Issue. 3, p. 726.

Tkadletz, Michael Lechner, Alexandra Pölzl, Silvia and Schalk, Nina 2021. Anisotropic wet-chemical etching for preparation of freestanding films on Si substrates for atom probe tomography: A simple yet effective approach. Ultramicroscopy, Vol. 230, Issue. , p. 113402.

Macauley, Chandra Heller, Martina Rausch, Alexander Kümmel, Frank Felfer, Peter and Stephenson, Leigh T. 2021. A versatile cryo-transfer system, connecting cryogenic focused ion beam sample preparation to atom probe microscopy. PLOS ONE, Vol. 16, Issue. 1, p. e0245555.

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Tkadletz, Michael Waldl, Helene Schiester, Maximilian Lechner, Alexandra Schusser, Georg Krause, Michael and Schalk, Nina 2023. Efficient preparation of microtip arrays for atom probe tomography using fs-laser processing. Ultramicroscopy, Vol. 246, Issue. , p. 113672.

Tkadletz, Michael Schiester, Maximilian Waldl, Helene Schusser, Georg Krause, Michael and Schalk, Nina 2024. fs-laser preparation of half grid specimens for atom probe tomography and transmission electron microscopy. Materials Today Communications, Vol. 39, Issue. , p. 108672.

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Sculpting Needle-Shaped Atom Probe Specimens with a Dual Beam FIB

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