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Roles of self-assembly and beam damage in gas-assisted electron and ion beam induced processing
Published online by Cambridge University Press: 23 September 2015
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- Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2155 - 2156
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- Copyright © Microscopy Society of America 2015
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