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The Role of Multi-Hit Detection Events on the Accurate Measurement of Boron in Atom Probe Tomography

Published online by Cambridge University Press:  27 August 2014

Frederick Meisenkothen ,
Ty J. Prosa ,
Eric B. Steel  and
R. Prakash Kolli
Frederick Meisenkothen
Affiliation:
Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, U.S.A
Ty J. Prosa
Affiliation:
CAMECA Instruments, Inc., Madison, U.S.A
Eric B. Steel
Affiliation:
Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, U.S.A
R. Prakash Kolli
Affiliation:
Department of Materials Science and Engineering, University of Maryland, College Park, U.S.A

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1962 - 1963
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Gault, B., et al., Atom Probe Microscopy, (Springer, NY) (2012, p. 223.Google Scholar
[2] Larson, D.J., et al., Handbook of Instrumentation and Techniques for Semiconductor Nanostructure Characterization, London: World Scientific Publishing, Vol. 2 (2011) 407.Google Scholar
[3] Certain commercial equipment, instruments, or materials are identified in this paper in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.Google Scholar
[4] Saxey, D.W. Ultramicroscopy, 111 (2011, p. 473.Google Scholar
[5] The authors would like to thank Dr. Karen Henry of Intel Corporation for her continued interest in this project. We also extend our appreciation to Dr. Doug Meier of NIST for providing some of the specimen materials used in this study.Google Scholar