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Review of Atom Probe FIB-Based Specimen Preparation Methods

Published online by Cambridge University Press:  14 November 2007

Michael K. Miller ,
Kaye F. Russell ,
Keith Thompson ,
Roger Alvis  and
David J. Larson
Michael K. Miller
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6136, USA
Kaye F. Russell
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6136, USA
Keith Thompson
Affiliation:
Imago Scientific Instruments, Madison, WI 53711, USA
Roger Alvis
Affiliation:
Imago Scientific Instruments, Madison, WI 53711, USA
David J. Larson
Affiliation:
Imago Scientific Instruments, Madison, WI 53711, USA
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Abstract

Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.

Keywords

atom probe tomographyspecimen preparationfocused ion beam
Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue 6: Special Issue: Atom Probe Tomography , December 2007 , pp. 428 - 436
Copyright
© 2007 Microscopy Society of America

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References

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