Hostname: page-component-7bb8b95d7b-lvwk9 Total loading time: 0 Render date: 2024-10-07T07:21:56.401Z Has data issue: false hasContentIssue false

Residual Stress in Focused Charged Particle Beam-Deposited Materials

Published online by Cambridge University Press:  05 August 2019

Gavin Mitchson*
Affiliation:
Thermo Fisher Scientific, Materials and Structural Analysis Division, Hillsboro, ORUSA.
Andrew Clarke
Affiliation:
Thermo Fisher Scientific, Materials and Structural Analysis Division, Hillsboro, ORUSA.
Jamie Johnson
Affiliation:
Thermo Fisher Scientific, Materials and Structural Analysis Division, Hillsboro, ORUSA.
*
*Corresponding author: [email protected]

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Focused Ion Beam Instrumentation and Techniques
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Utke, I, Hoffmann, P, and Melngailis, J, J. Vac. Sci. Technol. B 26 (2008), p. 1197.Google Scholar
[2]Reyntjens, S and Puers, R, J. Micromech. Microeng. 10 (2000), p. 181.Google Scholar
[3]Okada, S et al. , Japanese J. Appl. Physics 45 (2006), p. 5556.Google Scholar
[4]Igaki, J et al. , J. Vac. Sci. Technol. B 24 (2006), p. 2911.Google Scholar
[5]Korsunsky, AM, Sebastiani, M, and Bemporad, E, Surf. Coatings Technol. 205 (2010), p. 2393.Google Scholar
[6]Song, X et al. , Thin Solid Films 520 (2012), p. 2073.Google Scholar
[7]The authors thank Chad Rue and Tom Miller for their insights and conversations during this work.Google Scholar