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Residual Stress in Focused Charged Particle Beam-Deposited Materials
Published online by Cambridge University Press: 05 August 2019
Abstract
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- Type
- Advances in Focused Ion Beam Instrumentation and Techniques
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- Copyright
- Copyright © Microscopy Society of America 2019
References
[1]Utke, I, Hoffmann, P, and Melngailis, J, J. Vac. Sci. Technol. B 26 (2008), p. 1197.Google Scholar
[5]Korsunsky, AM, Sebastiani, M, and Bemporad, E, Surf. Coatings Technol. 205 (2010), p. 2393.Google Scholar
[7]The authors thank Chad Rue and Tom Miller for their insights and conversations during this work.Google Scholar
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