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Removal of Ga Implantation on FIB-prepared Atom Probe Specimens Using Small Beam and Low Energy Ar+ Milling

Published online by Cambridge University Press:  01 August 2018

C.S. Bonifacio ,
K.P. Rice ,
T.J. Prosa ,
M. Ray ,
T.F. Kelly  and
P.E. Fischione
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
K.P. Rice
Affiliation:
CAMECA Instruments Inc., Madison, WIUSA.
T.J. Prosa
Affiliation:
CAMECA Instruments Inc., Madison, WIUSA.
M. Ray
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
T.F. Kelly
Affiliation:
CAMECA Instruments Inc., Madison, WIUSA.
P.E. Fischione
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1118 - 1119
Copyright
© Microscopy Society of America 2018 

References

References:

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[2] Fisher, K Marquis, E Microscopy and Microanalysis 22 2016) p. 692.Google Scholar
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[4] Bonifacio, CS, et al., Microscopy and Microanalysis 23 2017) p. 268.Google Scholar
[5] Nowakowski, P, et al., Microscopy and Microanalysis 23 2017) p. 300.Google Scholar