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Reduce Charging Effects on Beam Sensitive Material by Optimized Scanning Routines in SEM

Published online by Cambridge University Press:  05 August 2019

Maximilian Schmid ,
Andreas Liebel ,
Friederike Michael ,
Grigore Moldovan  and
Heike Soltau
Maximilian Schmid*
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
Andreas Liebel
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
Friederike Michael
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
Grigore Moldovan
Affiliation:
point electronic GmbH, Erich-Neuß-Weg 15, 06120 Halle (Saale), Germany)
Heike Soltau
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
*
*Corresponding author: [email protected]

Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 474 - 475
Copyright
Copyright © Microscopy Society of America 2019