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Recent Advances in Gaseous Detection Modes in the ESEM

Published online by Cambridge University Press:  02 July 2020

T. A. Hardt
Affiliation:
FEI Company, 66 Concord Street, Wilmington, MA01887
W. R. Knowles
Affiliation:
FEI Company, 66 Concord Street, Wilmington, MA01887
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Extract

The Environmental Scanning Electron Microscope, or ESEM, is the only class of SEM that can image in a gaseous environment that will maintain a sample in a fully wet state. The use of the patented Gaseous Secondary Electron Detector, or GSED, which amplifies the secondary electron signal with the gas, has allowed the ESEM to image a multitude of samples with true secondary contrast. Recently, several new modes of imaging in a gas have been developed and will allow further expansion of the capabilities of the ESEM.

To maintain pressures in the ESEM up to 20 Torr (27 mbar), the use of multiple, differentially pumped apertures, is required. This can place a restriction on the low magnification range. In the large field detection mode, all magnification restrictions are removed. Magnifications as low as lOx may be achieved. This is similar to many conventional SEMs.

Type
Environmental Scanning Electron Microscopy and Other Wet Work
Copyright
Copyright © Microscopy Society of America

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References

references

1.Thiel, B. L., et al., J. Microscopy 187 Part 3(1997)143.CrossRefGoogle Scholar
2.Johnson, R., in An Introduction to ESEM, PEO Special Publication (1996)25.CrossRefGoogle Scholar