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A Readily-automated Scheme for Estimating the Critical Dose of Beam-Sensitive Materials

Published online by Cambridge University Press:  22 July 2022

Robert Colby
Robert Colby*
Affiliation:
Corporate Strategic Research, ExxonMobil Research and Engineering Company, Annandale, NJ

Abstract

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Type
On Demand - Electron Microscopy of Beam Sensitive Samples: The Trials and Tribulations of Electron-Beam Sample Interactions
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2236 - 2237
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Copyright
Copyright © Microscopy Society of America 2022

References

Egerton, R. F. Electron Energy-Loss Spectroscopy in the Electron Microscope. (Springer US, 2011).CrossRefGoogle Scholar
De la Pena, F., Prestat, E., Fauske, V. T., Burdet, P. hyperspy/hyperspy: HyperSpy v1.5.2. (2019).Google Scholar