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Quantitative Thickness Variation Measurements in 180 nm Cu Interconnects by HAADF STEM : Implications for in-situ Heating Experiments

Published online by Cambridge University Press:  05 August 2007

JH An  and
PJ Ferreira
JH An
Affiliation:
University of Texas at Austin
PJ Ferreira
Affiliation:
University of Texas at Austin
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 668 - 669
Copyright
© 2007 Microscopy Society of America

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