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Quantitative Study of the Transition Layers in Mo/Si; Multilayers from the Analysis of the Si KΒ X–ray Emission Band

Published online by Cambridge University Press:  01 August 2005

H Maury
Affiliation:
Université Pierre et Marie Curie, Paris, France
J–M André
Affiliation:
Université Pierre et Marie Curie, Paris, France
P Jonnard
Affiliation:
Université Pierre et Marie Curie, Paris, France

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Copyright
© 2005 Microscopy Society of America