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Quantitative Interpretation and Information Limits in Annular Dark-Field STEM Images

Published online by Cambridge University Press:  02 July 2020

P. D. Nellist  and
S. J. Pennycook
P. D. Nellist
Affiliation:
Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Birmingham, B15 2TTUK
S. J. Pennycook
Affiliation:
Oak Ridge National Laboratory, Solid State Division, PO Box 2008, Oak Ridge, TN37831-6030, USA
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Extract

In making quantitative measurements using electron micrographs we must regard the electron microscope as being an information channel. The information about the object is both in some way transformed by the image forming process, and information is lost through the existence of a spatial resolution limit and the addition of noise. To make quantitative measurements, we need to take account of all these effects.

Great progress has been made in making quantitative measurements from high-resolution transmission electron microscope (HRTEM) images (for example see Ref. [1]). However, the simulation of HRTEM images requires a full dynamical electron scattering calculation in addition to computing the effects of the objective lens aberrations. Although such calculations can provide excellent agreement with experimental data, the calculation times involved restrict the number of trial structure models that can be used, with the danger that such trial and error methods might miss the true object solution.

Type
The Theory and Practice of Scanning Transmission Electron Microscopy
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 104 - 105
Copyright
Copyright © Microscopy Society of America

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References

[1]Möbus, G. (1996). Ultramicroscopy 65, 205–216; Möbus, G. and Dehm, G. (1996). Ultramicroscopy 65, 217- 228.CrossRefGoogle Scholar
[2]Nellist, P.D. and Pennycook, S.J. (2000). Adv. Imaging & Electron. Phys. 113, in press.Google Scholar
[3]Rafferty, B.E., Nellist, P.D. and Pennycook, S.J. this volume.Google Scholar
[4]Nellist, P.D. and Pennycook, S.J. (1998). Phys. Rev. Lett. 81,4156.CrossRefGoogle Scholar
[5] This research was supported by the Royal Society (London) and the US DOE under contract DE-ACO5-96OR22464 with Lockheed Martin Energy Research.Google Scholar