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Quantification of STEM-EDS With Ion Implantation

Published online by Cambridge University Press:  25 July 2016

R. Garcia
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC 27695, USA
Y. Liu
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC 27695, USA
F. A. Stevie
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC 27695, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

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