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Quantification of Milling Rate and Reduction in Amorphous Damage using Low Energy, Small Spot, Argon Ion Milling for TEM Specimens prepared by FIB.

Published online by Cambridge University Press:  25 July 2016

Mina Abadier ,
Michael Boccabella ,
Junhai Liu  and
Paul Fischione
Mina Abadier
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632
Michael Boccabella
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632
Junhai Liu
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632
Paul Fischione
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 194 - 195
Copyright
© Microscopy Society of America 2016 

References

References:

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[4] Lotnyk, A, et al, Microelectronics Reliability 55 (2015). p. 2119.Google Scholar