Hostname: page-component-cd9895bd7-q99xh Total loading time: 0 Render date: 2024-12-23T06:28:13.516Z Has data issue: false hasContentIssue false
  • English
  • Français

Quantification of Milling Rate and Reduction in Amorphous Damage using Low Energy, Small Spot, Argon Ion Milling for TEM Specimens prepared by FIB.

Published online by Cambridge University Press:  25 July 2016

Mina Abadier ,
Michael Boccabella ,
Junhai Liu  and
Paul Fischione
Mina Abadier
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632
Michael Boccabella
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632
Junhai Liu
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632
Paul Fischione
Affiliation:
E. A. Fischione Instruments, Export, PA, USA 15632

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 194 - 195
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Mayer, J, et al, MRS Bulletin 32 (2007). p. 400.CrossRefGoogle Scholar
[2] Unocic, KA, et al, Journal of Microscopy 240 (2010). p. 227.Google Scholar
[3] Cerchiara, RR, et al, Microscopy Today 19 (2011). p. 16.CrossRefGoogle Scholar
[4] Lotnyk, A, et al, Microelectronics Reliability 55 (2015). p. 2119.Google Scholar