Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-23T11:32:56.508Z Has data issue: false hasContentIssue false
  • English
  • Français

Quantification of Composition of Epitaxial Si/SiGe by EELS

Published online by Cambridge University Press:  01 August 2018

Michael A. Gribelyuk ,
Wayne Zhao  and
Bianzhu Fu
Michael A. Gribelyuk
Affiliation:
ATD Characterization, GLOBALFOUNDRJES, Malta, NY
Wayne Zhao
Affiliation:
CCA Characterization, GLOBALFOUNDRIES, Malta, NY
Bianzhu Fu
Affiliation:
CCA Characterization, GLOBALFOUNDRIES, Malta, NY Currently at: Entegris Inc., Danbury, CT

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 472 - 473
Copyright
© Microscopy Society of America 2018 

References

[1] Fu, B., et al, Microsc. Microanal. 22(S3 2016) p. 1618.Google Scholar
[2] Mitchell, D.R.G. www.dmscripting.com v2.1 Sept 2012, Mean Free Path Estimator, plugin for Digital Micrograph Software.Google Scholar
[3] The authors acknowledge Michael Hollner, Mark Hudson for preparation of TEM samples.Google Scholar