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Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source
Published online by Cambridge University Press: 05 August 2019
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- Type
- Advances in Phase Retrieval Microscopy
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- Copyright
- Copyright © Microscopy Society of America 2019
References
[7]The authors gratefully acknowledge support from NSF STROBE DMR-1548924, DARPA STTR Award # W31P4Q-17-C-0104, a Gordon and Betty Moore Foundation EPiQS Initiative through Grant GBMF4538, an NSF GRFP fellowship, and a NDSEG fellowship. H.K. and M.M. are partial owners of KMLabs.Google Scholar
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