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A Proposal for Improved Helium Microscopy
Published online by Cambridge University Press: 11 April 2014
Abstract
Elimination of the electrostatic objective lens and alternative use of a Cc- and Cs-corrected quadrupole doublet may increase the useful working distance of the helium microscope, improve its resolution from 3 to 0.3 Å, and improve its optimum convergence angle from 0.4 to 4 mrad.
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- Instrumentation and Techniques Development
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- © Microscopy Society of America 2014
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