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Precision Material Modification and Patterning with Helium Ions

Published online by Cambridge University Press:  26 July 2009

DC Bell ,
M Lemme  and
CM Marcus
DC Bell
Affiliation:
Harvard University
M Lemme
Affiliation:
Harvard University
CM Marcus
Affiliation:
Harvard University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 658 - 659
Copyright
Copyright © Microscopy Society of America 2009