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Precision, Double XTEM Sample Preparation of Site Specific Si Nanowires

Published online by Cambridge University Press:  26 July 2009

LM Gignac ,
S Mittal ,
S Bangsaruntip ,
GM Cohen  and
JW Sleight
LM Gignac
Affiliation:
IBM T J Watson Research Center
S Mittal
Affiliation:
IBM T J Watson Research Center
S Bangsaruntip
Affiliation:
IBM T J Watson Research Center
GM Cohen
Affiliation:
IBM T J Watson Research Center
JW Sleight
Affiliation:
IBM T J Watson Research Center

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 330 - 331
Copyright
Copyright © Microscopy Society of America 2009