Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-27T08:49:29.064Z Has data issue: false hasContentIssue false
  • English
  • Français

Precession Electron Diffraction (PED) Strain Measurements in Stacked Nanosheet Structures

Published online by Cambridge University Press:  05 August 2019

J Li ,
S Mochizuki ,
J Zhang ,
N Loubet ,
J Gaudiello  and
B Haran
J Li*
Affiliation:
IBM, Albany, NY, USA.
S Mochizuki
Affiliation:
IBM, Albany, NY, USA.
J Zhang
Affiliation:
IBM, Albany, NY, USA.
N Loubet
Affiliation:
IBM, Albany, NY, USA.
J Gaudiello
Affiliation:
IBM, Albany, NY, USA.
B Haran
Affiliation:
IBM, Albany, NY, USA.
*
*Corresponding author: [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Microscopy and Spectroscopy of Nanoscale Materials for Energy Applications
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2018 - 2019
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Ghani, T et al. , IEDM (2003), p. 1161.Google Scholar
[2]Reboh, S et al. , Appl. Phys. Lett. 112 (2018), p. 051901.Google Scholar
[3]This work was performed by the Research Alliance teams at various IBM Research and Development Facilities.Google Scholar